We are an expert service provider for the EXCIMER Laser system. 

We offer service of re-marketing, repairs service, 308nm excimer laser refurbishments, and relocation services. Established the RD Lab Center and workshop in Taiwan. Warehouse for excimer laser spare parts stock.

Technology Service Item:

  • Excimer Laser tube refurbish and Repair service
  • Excimer Laser system Refurbishment and Retrofit
  • Excimer Laser system relocation service
  • Excimer Laser equipment parts trading
  • Customized Spare parts development

Laser Equipment Model:

  • Lambda Steel series LS1000
  • Lambda SX excimer laser series SX315C, SX200C
  • VYPER Series Laser

Excimer Laser Repair/Refurbishment Item:

  • Excimer Laser Discharge Chambers (LDU)
  • Output Coupler Lens (OC Lens)
  • Laser beam shutter
  • Laser beam dump
  • High Voltage Power Supply Repair (TDK Lambda LC1202L)
  • Gas module
  • Blower motor controller
  • Cryopump / Gas purify unit (GP)
  • Hand-held terminal (HHT) / Keba KeTop C50


Other miscellaneous parts:

  • Ultra 10 workstation
  • Optics, Lens A / B / C
  • ASML, NIKON, CANON parts improvement
  • HVPS Cable
  • Chamber windows
  • MV10A gas valve
  • Tube Pressure sensor