Wafer Handling System

Customized Portable Wafer Vacuum Wand
  • Vacuum Pump: Flow rate > 4 L/min
  • Vacuum Pad: Customized angle 0-45 degree
  • Stand alone vacuum pump
  • Option: Rechargeable Battery module
  • Option: Filter for liquid/Air separator
  • Option: Mini vacuum Guate
  • Wafer sorter system
  • Wafer ID reader system
  • Automatic visual inspection system
  • Wafer transfer (Manual/Automated operation)
  • Notch finder (Manual/Automated operation)
  • Flat finder (Manual/Automated operation)
  • Wafer selective / pick up system (Manual operation)
  • SMIF Pod Opener (Manual/Automated operation)
  • Solar wafer Load/Unload Transfer
  • PEEK + CF Tip Series
  • Vespel Tip Series
  • Customized Tip, Bending type with <30 degree available. 
  • Tip with Angle
  • Vacuum Wand
  • Portable VHS
  • Special Customized Portable Vacuum pump: High pressure, High flow rate
  • Vacuum Gauge, Mini Vacuum Gauge
  • Tuble & Connector
  • Stand
  • Metal wafer cassette
  • PFA wafer cassette
  • PVDF wafer carrier
  • Graphite wafer carrier
  • Quartz Boat
Metal Cassette Dim. for wafer side 2", 4", 6", 8" to 12" 

SEMI Standard Complaince



Ċ
Chang Ricky,
2016年4月7日 上午10:00