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Wafer Handling System

Vacuum Handling System for Substrate

  • Wafer sorter system
  • Wafer ID reader system
  • Automatic visual inspection system
  • Wafer transfer (Manual/Automated operation)
  • Notch finder (Manual/Automated operation)
  • Flat finder (Manual/Automated operation)
  • Wafer selective / pick up system (Manual operation)
  • SMIF Pod Opener (Manual/Automated operation)
  • Solar wafer Load/Unload Transfer

  • PEEK + CF Tip Series
  • Vespel Tip Series
  • Customized Tip
  • Tip with Angle
  • Vacuum Wand
  • Portable VHS
  • Vacuum Gauge
  • Tuble & Connector
  • Stand

  • Metal wafer cassette
  • PFA wafer cassette
  • PVDF wafer carrier
  • Graphite wafer carrier
  • Quartz Boat

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