Features - Semi Standard Compliance
- 2 ~ 6 Cassette Stage (Customized)
- High Speed and High Precision Wafer Pre-Aligner
- High Speed Wafer Transfer Robot (Edge Grip Hand or Vacuum Grip Hand)
- Wafer ID Reader (Front & Back side)
- Easy Operating & Maintenance
- INFO-pad (FOSB, PP Cassette)
Product - Wafer sorter system
- Wafer ID reader system
- Automatic visual inspection system
- Wafer transfer (Manual/Automated operation)
- Notch finder (Manual/Automated operation)
- Flat finder (Manual/Automated operation)
- Wafer selective / pick up system (Manual operation)
- SMIF Pod Opener (Manual/Automated operation)
- Solar wafer Load/Unload Transfer
Application Field- Semiconductor Silicon wafer transfer
- III-V Compound Semiconductor GaAs / Sapphire wafer handling
- PV Solar cell wafer handling
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