晶圓傳送系統

Wafer Handling System


Customized Portable Wafer Vacuum Wand

  • Vacuum Pump: Flow rate > 4 L/min

  • Vacuum Pad: Customized angle 0-45 degree

  • Stand alone vacuum pump

  • Option: Rechargeable Battery module

  • Option: Filter for liquid/Air separator

  • Option: Mini vacuum Guate

  • Wafer sorter system

  • Wafer ID reader system

  • Automatic visual inspection system

  • Wafer transfer (Manual/Automated operation)

  • Notch finder (Manual/Automated operation)

  • Flat finder (Manual/Automated operation)

  • Wafer selective / pick up system (Manual operation)

  • SMIF Pod Opener (Manual/Automated operation)

  • Solar wafer Load/Unload Transfer

12” Wafer Batch Transfers System

  1. Size: 12” Wafer,

  2. Mass Transfers:

  • FOUP to FOUP

  • FOSB to FOUP

  • Metal Cassette to FOUP

  • Mapping Sensor: Thru-Beam Type

  • Mapping System: Wafer mapping sensor insert to cassette (FOUP and FOSB) to detect an Empty Slot, Double Slot Detection and Cross Slot Detection

  • Wafer slip out of cassette or lift arms detection

  • FOUP, FOSB door move out detection

  • Metal Cassette safety bar move out detection

12” Wafer Batch Transfers System

  • Indicator: Light status indicator (Red, Yellow & Green) Lift arms up and down status indicator

  • First one piece of wafer auto searching and save for mapping

  • Wafer thickness auto distinguish and save for mapping

  • Start button, Home button & EMO button

  • Power: AC110 60HZ/AC 220 50HZ

  • Dimension: 1028 mm x 472 mm x 594 mm H

  • Weight: 64 Kgs

12 吋晶舟移載搬運機

規格：

  • 負載器載重：15Kgs Max.

  • 升降行程：1200 mm

  • 手持裝置：快上、快下，幔上、慢下、急停

  • 速度：快速160 mm/min 慢速 80 mm/min

  • 面板按鈕：4 個絕對位置設定，一鍵到位

  • 定速：130 mm/min

  • 負載器最高取件高度：1400mm

  • 負載器最低取件高度：220mm

  • Power：DC24V 鋰電池


8” Wafer Batch Transfers System

  • Size: 8” Wafer

  • HMI Control Panel

  • Batch Transfers: PP / PBT / PEI / PC Cassette to Metal Cassette

  • Mapping Sensor: Thru-Beam Type

  • Mapping System: Wafer mapping sensor insert to cassette to detect an Empty Slot / Double Slot Detection and Cross Slot Detection

  • Wafer slip out of cassette or lift arms detection

  • Metal Cassette’s safety bar move out detection

  • Indicator: Light status indicator (Red, Yellow & Green)

  • First one piece of wafer auto searching and save for mapping

  • Wafer thickness auto distinguish and save for mapping

  • EMO button

  • PEEK + CF Tip Series

  • Vespel Tip Series

  • Customized Tip, Bending type with <30 degree available.

  • Tip with Angle

  • Vacuum Wand

  • Portable VHS

  • Special Customized Portable Vacuum pump: High pressure, High flow rate

  • Vacuum Gauge, Mini Vacuum Gauge

  • Tuble & Connector

  • Stand

  • Metal wafer cassette

  • PFA wafer cassette

  • PVDF wafer carrier

  • Graphite wafer carrier

  • Quartz Boat

Metal Cassette Dim. for wafer side 2", 4", 6", 8" to 12"

SEMI Standard Complaince