Wafer Handling Tooling

Wafer Handling ToolingProduct

• • PEEK + CF Tip Series

  • Vespel Tip Series

  • Customized Tip

  • Tip with Angle

  • Vacuum Wand

  • Portable VHS

  • Vacuum Gauge

  • Tuble & Connector

  • Stand

Features

• • Every unique valve design ensures reliable suction and release of handled substrate.

  • The polished inner valve parts minimize particle generation.

  • The flatness of wafer tip provides excellent adhesion to handled substrate.

  • Various selective parts for your various handling application.

  • Various parts are compatible with our own product and for other vendors.

  • Major parts are made of engineering plastic to provide best abrasion resistance and less particle generation.

  • Carbon Fiber parts to insure dimensional stability.

  • ESD protection materials are applied to major parts of the system.

Application Field

• • Semiconductor Silicon wafer transfer

  • III-V Compound Semiconductor GaAs / Sapphire wafer handling

  • PV Solar cell wafer handling