Wafer Handling Tooling
Wafer Handling ToolingProduct
PEEK + CF Tip Series
Vespel Tip Series
Tip with Angle
Tuble & Connector
Every unique valve design ensures reliable suction and release of handled substrate.
The polished inner valve parts minimize particle generation.
The flatness of wafer tip provides excellent adhesion to handled substrate.
Various selective parts for your various handling application.
Various parts are compatible with our own product and for other vendors.
Major parts are made of engineering plastic to provide best abrasion resistance and less particle generation.
Carbon Fiber parts to insure dimensional stability.
ESD protection materials are applied to major parts of the system.
Semiconductor Silicon wafer transfer
III-V Compound Semiconductor GaAs / Sapphire wafer handling
PV Solar cell wafer handling