Wafer Handling Tooling
Wafer Handling ToolingProduct
- PEEK + CF Tip Series
- Vespel Tip Series
- Customized Tip
- Tip with Angle
- Vacuum Wand
- Portable VHS
- Vacuum Gauge
- Tuble & Connector
- Stand
Features
- Every unique valve design ensures reliable suction and release of handled substrate.
- The polished inner valve parts minimize particle generation.
- The flatness of wafer tip provides excellent adhesion to handled substrate.
- Various selective parts for your various handling application.
- Various parts are compatible with our own product and for other vendors.
- Major parts are made of engineering plastic to provide best abrasion resistance and less particle generation.
- Carbon Fiber parts to insure dimensional stability.
- ESD protection materials are applied to major parts of the system.
Application Field
- Semiconductor Silicon wafer transfer
- III-V Compound Semiconductor GaAs / Sapphire wafer handling
- PV Solar cell wafer handling
