Wafer Handling Tooling

Wafer Handling ToolingProduct

    • PEEK + CF Tip Series

    • Vespel Tip Series

    • Customized Tip

    • Tip with Angle

    • Vacuum Wand

    • Portable VHS

    • Vacuum Gauge

    • Tuble & Connector

    • Stand


    • Every unique valve design ensures reliable suction and release of handled substrate.

    • The polished inner valve parts minimize particle generation.

    • The flatness of wafer tip provides excellent adhesion to handled substrate.

    • Various selective parts for your various handling application.

    • Various parts are compatible with our own product and for other vendors.

    • Major parts are made of engineering plastic to provide best abrasion resistance and less particle generation.

    • Carbon Fiber parts to insure dimensional stability.

    • ESD protection materials are applied to major parts of the system.

Application Field

    • Semiconductor Silicon wafer transfer

    • III-V Compound Semiconductor GaAs / Sapphire wafer handling

    • PV Solar cell wafer handling