Wafer transfer system

Wafer transfer systemProduct

• • Wafer sorter system

  • Wafer ID reader system

  • Automatic visual inspection system

  • Wafer transfer (Manual/Automated operation)

  • Notch finder (Manual/Automated operation)

  • Flat finder (Manual/Automated operation)

  • Wafer selective / pick up system (Manual operation)

  • SMIF Pod Opener (Manual/Automated operation)

  • Solar wafer Load/Unload Transfer

Features

• • Semi Standard Compliance

  • 2 ~ 6 Cassette Stage (Customized)

  • High Speed and High Precision Wafer Pre-Aligner

  • High Speed Wafer Transfer Robot (Edge Grip Hand or Vacuum Grip Hand)

  • Wafer ID Reader (Front & Back side)

  • Easy Operating & Maintenance

  • INFO-pad (FOSB, PP Cassette)

Application Field

• • Semiconductor Silicon wafer transfer

  • III-V Compound Semiconductor GaAs / Sapphire wafer handling

  • PV Solar cell wafer handling